Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technology

Franco, JacopoJacopoFrancoArimura, HiroakiHiroakiArimuraBrus, StephanStephanBrusDentoni Litta, EugenioEugenioDentoni LittaCroes, KristofKristofCroesHoriguchi, NaotoNaotoHoriguchiKaczer, BenBenKaczer2025-01-132024-05-242025-01-1320240038-1101WOS:001223992700001https://imec-publications.be/handle/20.500.12860/43965Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technologyJournal article10.1016/j.sse.2024.108929WOS:001223992700001