Folkersma, StevenStevenFolkersmaBogdanowicz, JanuszJanuszBogdanowiczSchulze, AndreasAndreasSchulzeFavia, PaolaPaolaFaviaDirch, PetersenPetersenDirchOle, HansenHansenOleHenrik, HenrichsenHenrichsenHenrikNielsen, PeterPeterNielsenShiv, LiorLiorShivVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-2520182190-4286https://imec-publications.be/handle/20.500.12860/30719Electrical characterization of single nanometer-wide Si fins in dense arraysJournal articlehttps://www.beilstein-journals.org/bjnano/articles/9/178