Das, SayantanSayantanDasHung, JoeyJoeyHungHalder, SandipSandipHalderKoret, RoyRoyKoretTurovets, IgorIgorTurovetsCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLeray2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36598Scatterometry solutions for 14nm half-pitch BEOL layers patterned by EUV single exposureProceedings paperhttps://doi.org/10.1117/12.2583714