Tilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyne2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6883MEMS for wireless communications: "From RF-MEMS components to RF-MEMS-SiP"Proceedings paper