Accurate analytic expressions for frequency-dependent inductance and resistance of single on-chip interconnects on conductive silicon Substrate

Ymeri, HasanHasanYmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaexDe Roest, DavidDavidDe RoestVandenberghe, S.S.Vandenberghe2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7085Accurate analytic expressions for frequency-dependent inductance and resistance of single on-chip interconnects on conductive silicon SubstrateJournal article