The Use of Complex Cubic Splines as a Powerful Mathematical Representation for (n,k) Reference Spectra in Spectroscopic Ellipsometry Applications

Roussel, PhilippePhilippeRousselLibezny, MilanMilanLibeznyVanhellemont, JanJanVanhellemontMaes, HermanHermanMaes2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/844The Use of Complex Cubic Splines as a Powerful Mathematical Representation for (n,k) Reference Spectra in Spectroscopic Ellipsometry ApplicationsOral presentation