Goethals, MiekeMiekeGoethalsNiroomand, ArdavanArdavanNiroomandHosokawa, KoheiKoheiHosokawaVan Roey, FriedaFriedaVan RoeyPollentier, IvanIvanPollentierVan Den Heuvel, DieterDieterVan Den Heuvel2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18968EUV resist performance update on ADT and NXE:3100 scannerProceedings paper