A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution

Jovic, a.a.JovicUto, T.T.UtoHei, KefeiKefeiHeiSancho, J.J.SanchoSanchez, NuriaNuriaSanchezZinoviev, KirillKirillZinovievRubio, Jose L.Jose L.RubioMargaloo, E.E.MargalooPandraud, G.G.PandraudSarro, P.M.P.M.Sarro2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30985A highly miniturized single-chip MOEMS scanner for all-in-one imaging solutionProceedings paperhttps://ieeexplore.ieee.org/document/8346472