Renaud, MichaelMichaelRenaudKarakaya, KorayKorayKarakayaSterken, TomTomSterkenFiorini, PaoloPaoloFioriniVan Hoof, ChrisChrisVan HoofPuers, BobBobPuers2021-10-172021-10-1720080924-4247https://imec-publications.be/handle/20.500.12860/14365Fabrication, modelling and characterization of MEMS piezielectric vibration harvestersJournal article