Rottenberg, XavierXavierRottenbergMertens, RobertRobertMertensNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11134Filter-through device: a distributed RF-MEMS capacitive series switchJournal article