Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?

De Gendt, StefanStefanDe GendtHuber, A.A.HuberOnsia, BartBartOnsiaArnauts, SophiaSophiaArnautsKenis, KarineKarineKenisKnotter, D. M.D. M.KnotterMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3352Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?Proceedings paper