Stoeldraijer, J.J.StoeldraijerMulkens, J.J.MulkensDavies, G.G.DaviesSytsma, J.J.SytsmaBakker, H.H.BakkerGlatzel, H.H.GlatzelWagner, C.C.WagnerRoempp, O.O.RoemppBoerret, R.R.BoerretGoethals, MiekeMiekeGoethals2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2977Advanced 193 nm step and scan technologyMeeting abstract