Chava, BharaniBharaniChavaRio, DavidDavidRioSherazi, YasserYasserSheraziTrivkovic, DarkoDarkoTrivkovicGillijns, WernerWernerGillijnsDebacker, PeterPeterDebackerRaghavan, PraveenPraveenRaghavanElsaid, AhmadAhmadElsaidDusa, MirceaMirceaDusaMercha, AbdelkarimAbdelkarimMerchaRyckaert, JulienJulienRyckaertVerkest, DiederikDiederikVerkest2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25052Standard cell design in N7: EUV vs. immersionProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210407