Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

Pathangi Sriraman, HariHariPathangi SriramanChan, BTBTChanBayana, HareenHareenBayanaVan Den Heuvel, DieterDieterVan Den HeuvelVan Look, LieveLieveVan LookRincon Delgadillo, PaulinaPaulinaRincon DelgadilloCao, YiYiCaoKim, YiHoonYiHoonKimLin, G.G.LinParnell, DoniDoniParnellNafus, KathleenKathleenNafusHarukawa, RyotoRyotoHarukawaChikashi, ItoItoChikashiNagaswami, VenkatVenkatNagaswamiD'Urzo, LuciaLuciaD'UrzoGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25740Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flowProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210739