Gronheid, RoelRoelGronheidVan Roey, FriedaFriedaVan RoeyVan Steenwinckel, DavidDavidVan Steenwinckel2021-10-172021-10-1720080914-9244https://imec-publications.be/handle/20.500.12860/13819Using KLUP for understanding trends in EUV resist performanceJournal article