Kovalevich, TatianaTatianaKovalevichWitek, BarbaraBarbaraWitekRiggs, DanielDanielRiggsBekaert, JoostJoostBekaertVan Look, LieveLieveVan LookMaslow, Mark JohnMark JohnMaslow2023-06-092022-12-112023-03-162023-06-092022978-1-5106-6049-60277-786XWOS:000890070800007https://imec-publications.be/handle/20.500.12860/40859Spatial frequency breakdown of CD variationProceedings paper10.1117/12.2640808978-1-5106-6050-2WOS:000890070800007