Implementation of the IMEC-Clean in advanced CMOS manufacturing

Meuris, MarcMarcMeurisArnauts, SophiaSophiaArnautsCornelissen, IngridIngridCornelissenKenis, KarineKarineKenisLux, MarcelMarcelLuxDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertensTeerlinck, IvoIvoTeerlinckVos, RitaRitaVosLoewenstein, LeeLeeLoewensteinHeyns, MarcMarcHeynsWolke, K.K.Wolke2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3678Implementation of the IMEC-Clean in advanced CMOS manufacturingProceedings paper