Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistors

Vereecke, GuyGuyVereeckeDe Coster, HanneHanneDe CosterVan Alphen, SenneSenneVan AlphenCarolan, PatrickPatrickCarolanBender, HugoHugoBenderWillems, KherimKherimWillemsRagnarsson, Lars-AkeLars-AkeRagnarssonVan Dorpe, PolPolVan DorpeHoriguchi, NaotoNaotoHoriguchiHolsteyns, FrankFrankHolsteyns2021-10-262021-10-2620180167-9317https://imec-publications.be/handle/20.500.12860/32184Wet etching of TiN in 1-D and 2-D confined nano-spaces of FinFET transistorsJournal articlehttps://www.sciencedirect.com/science/article/abs/pii/S0167931718304544