IEEE Std P1838: DfT standard-under-development for 2.5D-, 3D-, and 5.5D-SICs

Marinissen, Erik JanErik JanMarinissenMcLaurin, TeresaTeresaMcLaurinJiao, HailongHailongJiao2021-10-232021-10-232016-05https://imec-publications.be/handle/20.500.12860/26961IEEE Std P1838: DfT standard-under-development for 2.5D-, 3D-, and 5.5D-SICsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7519330