A systematic study of trade-offs in engineering a locally strained pMOSFET

Nouri, FaranFaranNouriVerheyen, PeterPeterVerheyenWashington, LoriLoriWashingtonMoroz, VictorVictorMorozDe Wolf, IngridIngridDe WolfKawaguchi, S.S.KawaguchiBiesemans, SergeSergeBiesemansSchreutelkamp, RobRobSchreutelkampKim, Y.Y.KimShen, M.M.ShenXu, X.X.XuRooyackers, RitaRitaRooyackersJurczak, GosiaGosiaJurczakEneman, GeertGeertEnemanDe Meyer, KristinKristinDe MeyerSmith, L.L.SmithPramanik, D.D.PramanikForstner, H.H.ForstnerThirupapuliyur, S.S.ThirupapuliyurHigashi, G.G.Higashi2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9351A systematic study of trade-offs in engineering a locally strained pMOSFETProceedings paper