Electron spin resonance probing of defects in Si foils fabricated by the SLIM-cut methods

Kepa, J.J.KepaStesmans, AndreAndreStesmansMasolin, AlexAlexMasolinSimoen, EddyEddySimoen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24049Electron spin resonance probing of defects in Si foils fabricated by the SLIM-cut methodsProceedings paperhttps://doi.org/10.1016/j.egypro.2013.12.004