Moisture related low-k dielectric reliability before and after thermal annealing

Li, YunlongYunlongLiCiofi, IvanIvanCiofiCarbonell, LaureLaureCarbonellGroeseneken, GuidoGuidoGroesenekenMaex, KarenKarenMaexTokei, ZsoltZsoltTokei2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12478Moisture related low-k dielectric reliability before and after thermal annealingProceedings paper