Adelmann, ChristophChristophAdelmannOpsomer, KarlKarlOpsomerBrizzi, SimoneSimoneBrizziTallarida, MassimoMassimoTallaridaSchmeisser, DieterDieterSchmeisserSchram, TomTomSchramChew, Soon AikSoon AikChewHoriguchi, NaotoNaotoHoriguchiVan Elshocht, SvenSvenVan ElshochtRagnarsson, Lars-AkeLars-AkeRagnarsson2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21951Scalability of doped cubic HfO2 filmsMeeting abstracthttp://www2.avs.org/symposium/avs60/pdfs/abstractbook.pdf