An optical force measurement system with microfabricated mirror probes and in-plane tips for semiconductor device characterization

Hantschel, ThomasThomasHantschelArstila, KaiKaiArstila2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17218An optical force measurement system with microfabricated mirror probes and in-plane tips for semiconductor device characterizationMeeting abstract