A new gap-closing electrostatic vibrational energy harvester employing electrodes vertically integrated with a seismic mass

Hohlfeld, DennisDennisHohlfeldAltena, GeertGeertAltenaGoedbloed, MartijnMartijnGoedbloedvan Schaijk, RobRobvan Schaijk2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13883A new gap-closing electrostatic vibrational energy harvester employing electrodes vertically integrated with a seismic massProceedings paper