On trap identification in Gate-All-Around (GAA) Nanowire (NW) MOSFETs using Low Frequency Noise spectroscopy

Boudier, DimitriDimitriBoudierCretu, BogdanBogdanCretuSimoen, EddyEddySimoenVeloso, AnabelaAnabelaVelosoCollaert, NadineNadineCollaert2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27908On trap identification in Gate-All-Around (GAA) Nanowire (NW) MOSFETs using Low Frequency Noise spectroscopyProceedings paperhttp://ieeexplore.ieee.org/document/7985990/