El Rifai, JoumanaJoumanaEl RifaiSedky, SherifSherifSedkyVan Hoof, RitaRitaVan HoofSeveri, SimoneSimoneSeveriLin, DennisDennisLinSangameswaran, SandeepSandeepSangameswaranPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofWitvrouw, AnnAnnWitvrouw2021-10-202021-10-2020120924-4247https://imec-publications.be/handle/20.500.12860/20643SiGe MEMS at processing temperatures below 250CJournal article10.1016/j.sna.2012.01.035