Bogaerts, WimWimBogaertsWiaux, VincentVincentWiauxTaillaert, DirkDirkTaillaertBeckx, StephanStephanBeckxBaets, RoelRoelBaets2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6046SOI photonic crystal components fabricated with deep UV lithographyMeeting abstract