Heyns, MarcMarcHeynsMeuris, MarcMarcMeurisMertens, PaulPaulMertensHurd, TraceTraceHurdSchmidt, HaraldHaraldSchmidtDepas, MichelMichelDepasRotondaro, AntonioAntonioRotondaroVermeire, BertBertVermeireVandervorst, WilfriedWilfriedVandervorstStorm, WolfgangWolfgangStormPolleunis, C.C.PolleunisBertrand, P.P.BertrandMcGeary, M. J.M. J.McGearyLubbers, A.A.LubbersHatcher, Z.Z.Hatcher2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/677Just-Clean- Enough technology for the 21st centuryOral presentation