A new method to determine the internal pressure and leakage rate of MEMS packages

Wang, BoBoWangDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveriWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23372A new method to determine the internal pressure and leakage rate of MEMS packagesProceedings paper