Ultrasonic spray deposition of metal oxide films on high aspect ratio microstructures for 3D all-solid-state Li-ion batteries

Van den Ham, JonathanJonathanVan den HamGielis, SvenSvenGielisVan Bael, MarliesMarliesVan BaelHardy, AnAnHardy2021-10-232021-10-2320162380-8195https://imec-publications.be/handle/20.500.12860/27444Ultrasonic spray deposition of metal oxide films on high aspect ratio microstructures for 3D all-solid-state Li-ion batteriesJournal article10.1021/acsenergy/lett.6b00449http://pubs.acs.org/doi/full/10.1021/acsenergylett.6b00449