Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation

Huyghebaert, CedricCedricHuyghebaertConard, ThierryThierryConardBrijs, BertBertBrijsVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004-06https://imec-publications.be/handle/20.500.12860/9075Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiationJournal article