Optical properties and molecular composition of nitrogen doped diamond thin films grown in microwave CH1/H2/N2 plasma enhanced chemical vapor deposition

Ficek, M.M.FicekSankaran, KamatchiKamatchiSankaranRyl, J.J.RylNiedzialkowski, P.P.NiedzialkowskiBogdanowicz, R.R.BogdanowiczLin, I.N.I.N.LinHaenen, KenKenHaenen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26618Optical properties and molecular composition of nitrogen doped diamond thin films grown in microwave CH1/H2/N2 plasma enhanced chemical vapor depositionOral presentation