Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements

Hendrickx, NinaNinaHendrickxHimansu, SuyalSuyalHimansuVan Steenberge, GeertGeertVan SteenbergeMcCarthy, AongusAongusMcCarthyWalker, AndyAndyWalkerOttevaere, HeidiHeidiOttevaereThienpont, HugoHugoThienpontTaghizadeh, MohammedMohammedTaghizadehVan Daele, PeterPeterVan Daele2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10573Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elementsProceedings paper