Danilkin, EvgenyEvgenyDanilkinShamiryan, DenisDenisShamiryanBaklanov, MikhaïlMikhaïlBaklanovMilenin, AlexeyAlexeyMileninBoullart, WernerWernerBoullartKrasnikov, G.G.KrasnikovGutschin, OOGutschinMochalov, AAMochalov2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13583Effect of quartz window temperature on plasma composition during STI etchProceedings paper