Gronheid, RoelRoelGronheidSingh, ArjunArjunSinghSayan, SafakSafakSayanVandenbroeck, NadiaNadiaVandenbroeckChan, BTBTChanVandenberghe, GeertGeertVandenberghe2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22436DSA as a complementary lithography technique for contact hole patterningProceedings paper