Accurate and reliable optical CD of MuGFET down to 10nm

Leray, PhilippePhilippeLerayLorusso, GianGianLorussoCheng, ShauneeShauneeChengCollaert, NadineNadineCollaertJurczak, GosiaGosiaJurczakShirke, S.S.Shirke2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12468Accurate and reliable optical CD of MuGFET down to 10nmProceedings paper