Design and characterization of CPW feedthroughs in multi-layer thin-film MCM-D

Carchon, GeertGeertCarchonVaesen, KristofKristofVaesenBrebels, StevenStevenBrebelsDe Raedt, WalterWalterDe RaedtNauwelaers, BartBartNauwelaers2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4176Design and characterization of CPW feedthroughs in multi-layer thin-film MCM-DProceedings paper