Carrier spilling revisited: the on-bevel junction behavior of different electrical depth profiling techniques

Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonXu, MingweiMingweiXuVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5149Carrier spilling revisited: the on-bevel junction behavior of different electrical depth profiling techniquesMeeting abstract