Positive and negative bias temperature instability on sub-nanometer EOT high-K MOSFETs

Cho, Moon JuMoon JuChoAoulaiche, MarcMarcAoulaicheDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerFranco, JacopoJacopoFrancoKauerauf, ThomasThomasKaueraufRoussel, PhilippePhilippeRousselRagnarsson, Lars-AkeLars-AkeRagnarssonTseng, JoshuaJoshuaTsengHoffmann, Thomas Y.Thomas Y.HoffmannGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16865Positive and negative bias temperature instability on sub-nanometer EOT high-K MOSFETsProceedings paper