BEOL pre-metallization wet clean: post-etch residue removal and metal compatibility

Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersAkanishi, YuyaYuyaAkanishiIwasaki, AkihisaAkihisaIwasakiHolsteyns, FrankFrankHolsteyns2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31135BEOL pre-metallization wet clean: post-etch residue removal and metal compatibilityMeeting abstract