The effect of substrate radiation-induced defects on the operation of deep submicron silicon technologies

Simoen, EddyEddySimoenClaeys, CorCorClaeysPoyai, AmpornAmpornPoyai2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5659The effect of substrate radiation-induced defects on the operation of deep submicron silicon technologiesProceedings paper