Ozonated DI-water for clean chemical oxide growth

Cornelissen, IngridIngridCornelissenMeuris, MarcMarcMeurisWolke, K.K.WolkeWilkol, M.M.WilkolLoewenstein, LeeLeeLoewensteinDoumen, GeertGeertDoumenHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2463Ozonated DI-water for clean chemical oxide growthOral presentation