Thickness dependent residual stress in sputtered AlN thin films

Pobedinskas, PauliusPauliusPobedinskasBolsée, J.C.J.C.BolséeDexters, W.W.DextersRuttens, BartBartRuttensMortet, VincentVincentMortetD'Haen, JanJanD'HaenManca, JeanJeanMancaHaenen, KenKenHaenen2021-10-202021-10-2020120040-6090https://imec-publications.be/handle/20.500.12860/21313Thickness dependent residual stress in sputtered AlN thin filmsJournal article