Put, BrechtBrechtPutMees, MaartenMaartenMeesHornsveld, NorahNorahHornsveldHollevoet, SimonSimonHollevoetSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezVereecken, PhilippePhilippeVereeckenKessels, ErwinErwinKesselsCreatore, AdrianaAdrianaCreatore2021-10-272021-10-2720190013-4651https://imec-publications.be/handle/20.500.12860/33835Plasma - Assisted ALD of Lipo(N) for Solid State BatteriesJournal articlehttp://jes.ecsdl.org/content/166/6/A1239.full