A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

Nibhanupudi, S. S. TejaS. S. TejaNibhanupudiPrasad, DivyaDivyaPrasadDas, ShidharthaShidharthaDasZografos, OdysseasOdysseasZografosRobinson, AlexAlexRobinsonGupta, AnshulAnshulGuptaSpessot, AlessioAlessioSpessotDebacker, PeterPeterDebackerVerkest, DiederikDiederikVerkestRyckaert, JulienJulienRyckaertHellings, GeertGeertHellingsMyers, JamesJamesMyersCline, BrianBrianClineKulkarni, Jaydeep P.Jaydeep P.Kulkarni2022-12-212022-07-222022-09-062022-12-212022-07-070018-9383WOS:000824756400001https://imec-publications.be/handle/20.500.12860/40160A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology NodesJournal article10.1109/TED.2022.3186657WOS:000824756400001Electrical & electronic engineering