Verhaegen, KatarinaKatarinaVerhaegenBaert, KrisKrisBaertPuers, BobBobPuersSansen, WillyWillySansenSimaels, J.J.SimaelsVan Driessche, W.W.Van DriesscheHermans, LouLouHermansMertens, RobertRobertMertens2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3998A high-throughput silicon microphysiometerOral presentation