Single element and metal alloy novel EUV mask absorbers for improved imaging

Philipsen, VickyVickyPhilipsenLuong, VuVuLuongSouriau, LaurentLaurentSouriauAltamirano Sanchez, EfrainEfrainAltamirano SanchezAdelmann, ChristophChristophAdelmannHendrickx, EricEricHendrickxScholze, FrankFrankScholzeLaubis, ChristianChristianLaubisKruemberg, JensJensKruembergReuter, ChristianChristianReuter2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29170Single element and metal alloy novel EUV mask absorbers for improved imagingProceedings paperhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10450/104500G/Single-element-and-metal-alloy-novel-EUV-mask-ab