Early Periods of Low-Temperature Linear Antenna CVD Nucleation and Growth Study of Nanocrystalline Diamond Films

Mallik, AwadeshAwadeshMallikShih, Wen-ChingWen-ChingShihPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2024-04-112024-03-092024-04-1120242079-6412WOS:001172312300001https://imec-publications.be/handle/20.500.12860/43652Early Periods of Low-Temperature Linear Antenna CVD Nucleation and Growth Study of Nanocrystalline Diamond FilmsJournal article10.3390/coatings14020184WOS:001172312300001PLASMA CVDDEPOSITIONNANODIAMONDENHANCEMENTAPPARATUSSYSTEM