Dielectric reliability of 70 nm pitch air-gap interconnect structures

Pantouvaki, MariannaMariannaPantouvakiSebaai, FaridFaridSebaaiKellens, KristofKristofKellensGoossens, DannyDannyGoossensVereecke, BartBartVereeckeVersluijs, JankoJankoVersluijsVan Besien, ElsElsVan BesienCaluwaerts, RudyRudyCaluwaertsMarrant, KoenKoenMarrantBender, HugoHugoBenderMoussa, AlainAlainMoussaStruyf, HerbertHerbertStruyfBeyer, GeraldGeraldBeyer2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19537Dielectric reliability of 70 nm pitch air-gap interconnect structuresJournal article